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dc.contributor.authorGürbüz, Mevlüt
dc.contributor.authorÇelik, Umit
dc.contributor.authorSakurai, Hideaki
dc.contributor.authorKuromitsu, Yoshirou
dc.contributor.authorOral, Ahmet
dc.contributor.authorDoğan, Aydın
dc.date.accessioned2019-10-22T16:58:35Z
dc.date.available2019-10-22T16:58:35Z
dc.date.issued2014
dc.identifier.isbn978-1-4799-3860-5
dc.identifier.urihttps://hdl.handle.net/11421/21490
dc.descriptionIEEE Joint International Symposium on the Applications of Ferroelectrics / International Workshop on Acoustic Transduction Materials and Devices / Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM) -- MAY 12-16, 2014 -- State College, PAen_US
dc.descriptionWOS: 000363973100021en_US
dc.description.abstractIn piezoelectric market, infrared detectors, pyroelectric and piezoelectric sensors, microwave devices, actuators, transducers, non-volatile random access memories, and micro electromechanical systems are fabricated using lead zirconate titanate (PZT) based films. These films are deposited by chemical vapor deposition, physical vapor deposition spin coating, screen printing and electrospray deposition (ESD) technique. Among them, ESD is the most preferred method because of its high material efficiency, simplicity of experimental set up, wide choice of precursor and low cost. Therefore, the purpose of this study is to fabricate and characterize the ESD deposited PZT films. In our study, Pb(Zr0.Ti-52(0.48))O-3 (PZT) nano powders (Nanotech Corp. Turkey) and MMC PZT sol (Mitsubishi Corp. Japan) combinations were mixed in various concentrations. Prepared composite PZT slurries were coated with ESD technique. Fabricated PZT thick films were characterized with scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction method (XRD) to evaluate surface and crystal structure of the films. The results show that, MMC sol and PZT nanopowder combinations provide smooth and homogeneous film surface., dense and non-cracked film microstructure was observed using excess PbO during sintering.en_US
dc.description.sponsorshipIEEEen_US
dc.language.isoengen_US
dc.publisherIEEEen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectPiezoelectricen_US
dc.subjectPzt Filmen_US
dc.subjectEsden_US
dc.subjectCaharacterizationen_US
dc.titleStructural and Electrical Characterization of Electro Spray Deposited PZT Sol-PZT Nanopowder Composite Thick Filmsen_US
dc.typeconferenceObjecten_US
dc.relation.journal2014 Joint IEEE International Symposium On the Applications of Ferroelectrics, International Workshop On Acoustic Transduction Materials and Devices & Workshop On Piezoresponse Force Microscopy (Isaf/Iwatmd/Pfm)en_US
dc.contributor.departmentAnadolu Üniversitesi, Mühendislik Fakültesi, Malzeme Bilimi ve Mühendisliği Bölümüen_US
dc.identifier.startpage79en_US
dc.identifier.endpage82en_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.contributor.institutionauthorDoğan, Aydın


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