Browsing PubMed İndeksli Yayınlar Koleksiyonu by Subject "Magnetron Sputtering"
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Evolution of Vibrational Modes of SiO2 During the Formation of Ge and Si Nanocrystals by Ion Implantation and Magnetron Sputtering
(Amer Scientific Publishers, 2010)Structural variations of SiOx matrix have been studied with Fourier Transform Infrared Spectroscopy (FTIR) during the formation of Si and Ge nanocrystal. Two frequently used methods, magnetron sputtering and ion implantation ...