Yayıncı "Canadian Science Publishing, Nrc Research Press" Makale Koleksiyonu için listeleme
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Comments on the Langmuir probe measurements of radio-frequency capacitive argon-hydrogen mixture discharge at low pressure
(Canadian Science Publishing, Nrc Research Press, 2018)In this paper, the current-voltage graphs of discharge in the chamber of capacitive coupled radio frequency (CCRF) at low pressure were presented for Langmuir probe. The Langmuir probe measurements for estimating the ... -
Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream
(Canadian Science Publishing, Nrc Research Press, 2017)In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy ...