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Buffer effects on the mosaic structure of the HR-GaN grown on 6H-SiC substrate by MOCVD
Arslan, Engin; Öztürk, Mustafa K.; Tıraş, Engin; Tıraş, Tülay; Özçelik, Süleyman; Özbay Ekmel (Springer, 2017)High-resistive GaN (> 10(8) a"broken vertical bar cm) layers have been grown with different buffer structures on 6H-SiC substrate using metalorganic chemical vapor deposition reactor. Different combination of the GaN/AlN ...