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Influence of Al concentration on structural and optical properties of Al-doped ZnO thin films

Takci, Deniz Kadir; Tuzemen, Ebru Senadim; Kara, Kamuran; Yılmaz, Sadi; Esen, Ramazan; Bağlayan, Özge (Springer, 2014)

Undoped ZnO and Al-doped zinc oxide (ZnO:Al) thin films with different Al concentrations were prepared onto Si (100) substrate by pulsed filtered cathodic vacuum arc deposition system at room temperature. The influence of ...