Synthesis of compositionally different multicomponent metal-oxide films (SnO2)(x)(ZnO)(1-x) (x=1-0.5)

Abstract

The study is concerned with high-purity SnO2 and ZnO powders produced from salt solutions of corresponding metals by low-temperature hydrothermal synthesis. Fragments of SnO2 and ZnO ceramic targets formed as 1 x 8 cm bars are fabricated by dry pressing. The bars are used to form composite targets for ion-beam sputtering and the fabrication of compositionally different (SnO2) (x) (ZnO)(1 - x) (x = 1-0.5) films appropriate for the production of gas sensors or transparent electronic devices. The optical and electrical parameters of the films with different compositions are studied.