An investigation on optical properties of capacitive coupled radio-frequency mixture plasma with Langmuir probe

Abstract

The properties of Capacitively Coupled Radio Frequency (CCRF) plasmas for mixture gases have not already been known. Therefore, our goal in this paper is to understand the characteristics of mixture gas discharges in the different ratio of capacitive coupled discharge at low pressure. For this aim, the single Langmuir probe can be used to estimate the electron temperature and the electron density of the mixture discharge in a capacitive coupled discharge plasma system at low pressure. The characteristics of helium (He) and electronegative oxygen (O-2) mixture plasma is determined by the single Langmuir probe. The ratio of the ion saturation current to electron saturation current is investigated with obtaining values from this probe. The optical emission measurements have been taken to minimize the deficiency of the Langmuir probe diagnostics