Control of Optical Amplification Process with Extremely Low Background Loss in Er:Al2O3 Waveguides

Abstract

We report on record low-loss single mode a-Al2O3 planar waveguides and growth optimization of a-Er2O3 layers to control erbium-doping level of a-Al2O3 layers realized using Atomic Layer Deposition (ALD). Effect of growth cycle ratio of as grown Er2O3/Al2O3 layers on Photoluminescence (PL) is reported.